[Catalog] PVR1130 Pre Aligner : Robotics (Clean)

PVR1130 Pre Aligner Basic Specifications

Item	Specifications
Wafer size	300 mm
Fiducial Recognition	Notch
Wafer Material	Silicon or Quartz*
Alignment accuracy	Rotation : ±0.03° Wafer center : ±0.1mm
Alignment time	Less than 1.7sec
Clean Class	ISO Class1
Light source of sensor	RED LED
The extent of movement	Rotation : unlimited
Main components	AC servo motor with 20bit Incremental Encoder ( AC200V )
Detection of position	θaxis : incremental encoder of motor
Wafer holding method	Vacuum adsorption
Vacuum requirement	-80 to –70 kPa , 2L/min
Approx. mass	5.8 kg

반도체[Catalog] PVR1130 Pre Aligner